9:30 AM - 9:45 AM
[23a-F408-3] Evaluation of amorphous selenium films by reflection spectroscopy
Keywords:selenium, refractive index, reflectance
Amorphous selenium (a-Se) has been applied to high-sensitivity image pickup tubes and X-ray image sensors. Further improvement of properties requires an essential understanding of defect levels in the bandgap. Photothermal deflection spectroscopy (PDS) is a suitable method for evaluating defect states in a-Se thin films. In order to utilize PDS, it is necessary to obtain the refractive index of the sample. In this study, we investigated the optical reflectance in a wide wavelength range from visible light to infrared light, and estimated the refractive index of the a-Se thin film.