[23p-E105-1~15] 12.7 Biomedical Engineering and Biochips

△ [23p-E105-8] Proposal and fabrication of ion image sensor enables measurement under light irradiation

〇Runa Honjo¹, Kenta Sembo¹, Yoshiko Noda¹, Daisuke Akai¹, Takeshi Hizawa¹, Yasuyuki Kimura¹, Yong-joon Choi¹, Kazuhiro Takahashi¹, Kazuaki Sawada¹, Toshihiko Noda¹ (1.Toyohashi Univ.)

Keywords:Semiconductor image sensor, pH measurement, Light removal sensor

As a result of research so far, an insertion type sensor has been developed for directly measuring in-vivo information of plants. However, since this sensor cannot measure accurately when exposed to light, a novel sensor is required that is not affected by light. Conventional ion image sensors cannot separate between changes in pH and light output voltage. In this study, novel approach is proposed to measure pH and light separately by combination of two sensors with different characteristics. Two sensors were designed by changing device dimension such as sensing area. Designed sensors were fabricated and characterized. Sensor with a characteristic difference have successfully fabricated as designed.