2:30 PM - 2:45 PM
▲ [23p-E307-4] [The 13th Silicon Technology Division Young Researcher Award] Ferroelectric properties of room-temperature sputter-deposited AlScN films
Keywords:Ferroelectric, AlScN, sputter
Ferroelectricity in Al1-xScxN films has been reported in 2019 with a large remanent polarization of over 100 uC/cm2. Many kinds of research, including deposition, characteristics, and reliability, have been conducted so far. In this presentation, we will show the ferroelectricity of room-temperature deposited Al0.78Sc0.22N films.