Evaluation of electrical reliability of Pb(Zr,Ti)O<sub>3 </sub>thin film

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

Wed. Mar 23, 2022 1:30 PM - 3:30 PM P04 (Poster)

1:30 PM - 3:30 PM

〇Takumi Nishikado¹, Kota Onishi¹, Isaku Kanno¹, Yurina Amamoto², Tomohiro Date², Noriyuki Shimoji² (1.Kobe Univ., 2.Rohm)

Keywords:piezoelectric thin film, PZT, reliability