[23p-P05-1~11] 6.2 Carbon-based thin films

[23p-P05-10] Electrochemical activity of DLC deposition by low frequency CVD process

〇(B)MATSUZAKI MITSUAKI¹, KAWAKAMI AKIHIKO¹, HASEBE SHINICHI¹, KIGAWA KEITA¹, KUBO YOSHIKI¹, MUKOUYAMA YOSHIHARU¹, HIRAKURI KENJI¹, OHGOE YASUHARU¹ (1.Tokyo Denki Univ.)

Keywords:diamond-like carbon, Chemical Electrode, Ion sensor

A wide potential window and high electrochemical activity are required for highly sensitive electrodes for ion sensors. Diamond like carbon (DLC) has a wide potential window and is expected to be used as an electrode for ion sensors. However, the low electrochemical activity of DLC has been a problem.
In general, high frequency (RF) plasma processes are used for the deposition of DLC. In low-frequency (LF) plasma deposition of DLC, the kinetic energy of the material ions is higher due to the increased self-bias. As a result, changes in film quality can be targeted. In this study, DLC electrodes were fabricated by RF and LF plasma CVD to improve the electrochemical activity of DLC, and the electrochemical activity was evaluated.
As a result, it was suggested that the electrochemical activity was improved by LF deposition.