[23p-P05-1~11] 6.2 Carbon-based thin films

[23p-P05-3] Structural change of hydrogenated DLC film by thermal treatment

〇Tomohiro Mishima¹, Hibiki Terai¹, Koji Nakanishi¹, Masahito Niibe¹, Kazuhiro Kanda¹, Naoki Fukumuro², Masaya Takeuchi², Fuminobu Hori³, Atsushi Yabuuchi⁴, Atsushi Kinomura⁴ (1.Lasti,Univ.Hyogo, 2.Eng.,Univ.Hyogo, 3.Eng.,Osaka Pref.Univ., 4.KURNS,Kyoto Univ)

Keywords:Diamond-like carbon