Effects of CNP Coverage on Film Stress of a-C:H film inserted by CNP layer

Daichi Yoshikawa, Shinjiro ono, Sung Hwa Hwang, Takamasa Okumura, Kunihiro Kamataki, Naoto Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Susumu Takabayashi, Jun Seok Oh, Tatsuyuki Nakatani

Presentation information

Oral presentation

CS Code-sharing session » 【CS.7】 Code-sharing Session of 8.3 & 9.2 & 13.6 & 15.3

[24a-D316-1~9] CS.7 Code-sharing Session of 8.3 & 9.2 & 13.6 & 15.3

Thu. Mar 24, 2022 9:00 AM - 11:30 AM D316 (D316)

Shinya Kano(AIST), Takayuki Hasegawa(Osaka Inst. of Tech.)

10:15 AM - 10:30 AM

[24a-D316-5] Effects of CNP Coverage on Film Stress of a-C:H film inserted by CNP layer

〇Daichi Yoshikawa¹, Shinjiro ono¹, Sung Hwa Hwang¹, Takamasa Okumura¹, Kunihiro Kamataki¹, Naoto Yamashita¹, Naho Itagaki¹, Kazunori Koga^1,2, Masaharu Shiratani¹, Susumu Takabayashi³, Jun Seok Oh⁴, Tatsuyuki Nakatani⁵ (1.Kyushu Univ., 2.NINS, 3.Ariake College, 4.Osaka City Univ., 5.Okayama Univ. Sci.)

Keywords:carbon nano particles, film stress, DLC