[24a-D316-1~9] CS.7 Code-sharing Session of 8.3 & 9.2 & 13.6 & 15.3

[24a-D316-7] Radical oxidation of silicon by gold nanoparticle plasmons

〇Takeshi Kitajima¹, Kazuyasu Watanabe¹, Toshiki Nakano¹ (1.Nat. Def. Acad.)

Keywords:plasma, plasmon, gold nanoparticle

In recent years, catalytic reactions utilizing gold nanoparticles plasmons have been utilized. We have applied hot electrons supplied from gold nanoparticles to plasma surface reactions to utilize them for the formation of high-quality ultrathin films at room temperature. This time, for the purpose of forming an ultrathin silicon oxide film, we focused on the action of infrared light for plasmon excitation and plasma VUV light, and discovered a local heating effect that promotes radical oxidation.