[24a-E101-1~7] 7.1 X-ray technologies

[24a-E101-1] Design of high spectral flux soft X-ray laminar type multilayer gratings for 1-2 keV region

〇Masato Koike^1,2,3, Tadashi Hatano^2,4, Alexander Pirozhkov¹, Yuki Ohue⁵, Nobukazu Hayashi⁵, Masami Terauchi² (1.QuBS, QST, 2.IMRAM, Tohoku Univ., 3.Dept. of Eng., Osaka City Univ., 4.SRIS, Tohoku Univ., 5.Device Dept., Shimadzu Corp.)

Keywords:grating, multilayer, spectral flux

New soft X-ray multilayer gratings for a constant-incidence angle spectroscope used for a region of 1 to 2 keV were designed. The groove structure and multilayer structure of the diffraction grating, and incident angle are optimized for diffraction efficiency and spectral flux. Spectral flux is a recently introduced index which is represented by the product of the diffraction efficiency and the cosine of the incident angle, and well correlated with the analytical sensitivity. The multilayer structure is aperiodic. In the presentation, in addition to the diffraction efficiency and spectral flux of the diffraction grating, the imaging characteristics and resolution as a spectroscope will be described.