[24a-E101-1~7] 7.1 X-ray technologies

[24a-E101-3] Fabrication of a multilayer diffraction grating for high throughput monochromators in the 1-5 keV soft X-ray region

〇Tadashi Hatano^1,2, Takashi Imazono³, Takeo Ejima^1,2 (1.SRIS, Tohoku Univ., 2.IMRAM, Tohoku Univ., 3.QuBS, QST)

Keywords:diffraction grating, multilayer, tender X-ray

Varied deviation angle type monochromators are being designed aiming development of a high throughput multilayer diffraction grating monochromator satisfying the Bragg condition of the periodic multilayer in the 1-5 keV region. A W (1.6 nm)/B₄C (2.4 nm) 40 period multilayer was deposited on a laminar-type diffraction grating of 3200 lines/mm groove density, and the diffraction efficiency in the 1-5 keV region was measured at beamlines 11D, 11B and 20B at the Photon Factory.