[24a-E101-1~7] 7.1 X-ray technologies

[24a-E101-7] High Irradiance Illuminator for Transmission Laboratory EUV Microscopy (2)

〇(M2)Shuntarou Waki¹, Yusuke Tsukui¹, Jun Chen¹, Mitsunori Toyoda¹ (1.Tokyo Polytechnic Univ.)

Keywords:EUV, EUV microscopy

We are developing a transmission EUV microscope. The conventional illumination system consists of a spherical multilayer mirror, which reduces the illumination intensity due to spherical aberration. In this study, we report the results of a prototype high intensity illumination system with a parabolic mirror. Mo/Si multilayers were deposited on two substrates fabricated by MRF polishing, an illumination system (aperture:0.22, magnification:x1) was constructed, and the illumination intensity was evaluated. As a result, the illuminance was 1.4x10⁸ Photon/mm²/pulse, which is about 20 times higher than that of the spherical surface.