[24a-E105-1~10] 12.7 Biomedical Engineering and Biochips

△ [24a-E105-9] Investigation of electrochemical surface modification for biomolecular recognition using solution-gated ultrathin channel ITO-based transistor

〇(B)Ritsu Katayama¹, Xianqi Dong¹, Toshiya Sakata¹ (1.The Univ. of Tokyo)

Keywords:ITO, biosensor, aptamer

In our laboratory, it was found that it is possible to fabricate solution-gate FETs consisting only of ITO in a single step by sputtering ITO using a shadow mask. In this work, we investigate the electrical properties of solution-gate ITO-FET, which are fabricated in a single step using a semiconducting ITO film as the channel and conductive ITO as the source and drain electrodes, and the chemical modification of the ITO channel surface for biosensor applications.