The 69th JSAP Spring Meeting 2022

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Symposium (Oral)

Symposium » Semiconductors Pioneer Carbon Neutral Future

[24a-E201-1~11] Semiconductors Pioneer Carbon Neutral Future

Thu. Mar 24, 2022 9:30 AM - 11:40 AM E201 (E201)

Emi Tamechika(Yokohama Natl. Univ.)

11:05 AM - 11:15 AM

[24a-E201-8] Toward the realization of a sustainable society ~Engineer's challenge in the field of semiconductor manufacturing equipment~

〇Kota Tanikawa1 (1.SCREEN)

Keywords:Semiconductor manufacturing equipment