[24a-E301-1~10] 3.11 Photonic structures and phenomena

[24a-E301-9] Investigation on fabrication process for High-Q coupled nanocavity system with electrical control (2)

〇Kazuki Inoue¹, Bong Shik Song^1,2, Takashi Asano¹, Susumu Noda¹ (1.Kyoto Univ., 2.Sungkyunkwan Univ.)

Keywords:photonic crystal, cavity, electrical control

So far,we have demonstrated photon transfer in high-Q coupled nanocavity system with electrical control. However, the storage nanocavity in this system shows the lower Q factor than the nanocavity without electrical control system. During the ion-doping process, the Q factor may be decreased. In the last meeting, I investigated the mask for ion implantation and reported the Q factor improved. Here, we form the n-i-n structure and make a cavity in i region. I'll report the results.