[24a-F408-1~8] 9.2 Nanoparticles, Nanowires and Nanosheets

[24a-F408-7] Investigation of Molecular Discrimination by Self-Heating of
Homogeneous Metal Oxide Sensor

〇(M1)Shintaro Nagata¹, Tsunaki Takahashi^1,2, Honda Haruka¹, Saga Shoo³, Kaoru Yamashita³, Shiiki Yohsuke³, Hosomi Takuro^1,2, Tanaka Wataru¹, Kanai Masaki⁴, Nagashima Kazuki^1,2, Ishikuro Hiroki³, Yanagida Takeshi^1,4 (1.Tokyo Univ., 2.JST PRESTO, 3.Keio Univ., 4.Kyushu Univ.)

Keywords:molecular discrimination, self heating, metal oxide semiconductor

Molecular sensor arrays are widely studied for the electrical detection of various moleculars in the atmosphere. However, there are some technical challenges in integrating heterogeneous materials into sensor arrays. In this study, we proposed the surface temperature control of metal oxide sensor thin film channels by using Joule heating, and investigated the possibility of discriminating various moleculars by means of a homegeneous sensor material.