The 69th JSAP Spring Meeting 2022

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Oral presentation

8 Plasma Electronics » 8.3 Plasma nanotechnology

[24p-D114-1~11] 8.3 Plasma nanotechnology

Thu. Mar 24, 2022 1:00 PM - 4:15 PM D114 (D114)

Takeshi Kitajima(National Defence Academy), Manabu Tanaka(Kyushu Univ.)

3:15 PM - 3:30 PM

△ [24p-D114-8] Effect of ion irradiation angle on oriented growth of carbon nanowalls in plasma-enhanced chemical vapor deposition

〇(M1)Shintaro Iba1, Hiroki Kondou2, Kenji Ishikawa2, Takayoshi Tsutsumi2, Mineo Hiramatsu3, Makoto Sekine2, Masaru Hori2 (1.Nagoya Univ. Eng., 2.Nagoya Univ. Center for Low-temperature Plasma Sciences, 3.Meijo Univ.)

Keywords:Carbon nanowalls