[24p-D214-1~11] 3.16 Optics and Photonics English Session

▲ [24p-D214-3] Low Loss InP-Rib Waveguide on Si Substrate for Membrane Photonic Integrated Circuits

〇(M2)Ruihao Xue¹, Weicheng Fang¹, Naoki Takahashi¹, Shunto Katsumi¹, Yoshitaka Ohiso¹, Tomohiro Amemiya^1,2, Nobuhiko Nishiyama^1,2 (1.Tokyo Tech., 2.IIR)

Keywords:InP-rib waveguide

To replace the global electrical wiring of Si-LSI with optical wiring, InP-based membrane photonic integrated circuits (MPICs) bonded on Si-substrate is a solution. Among the devices in MPICs, performances of the waveguides are very important since it determines the majority of loss budget. Our group has demonstrated the GaInAsP wire waveguide with the transmission loss of 4 dB/cm. To reduce the loss, it is known that introducing the rib waveguide is effective, but it caused larger bending loss. Therefore, we proposed and numerically demonstrated InP deep etch rib structure to reduce transmission loss while maintain low bending loss with the bending radius of 10 µm. In this report, the InP-rib waveguide was actually fabricated and characterized.