[24p-D316-1~11] 1.3 Novel technologies and interdisciplinary engineering

[24p-D316-1] [The 22nd JSAP Outstanding Achievement Award Speech] Contribution to Development of MEMS Technology and Its Industrialization

〇Masayoshi Esashi¹ (1.Tohoku Univ.)

Keywords:MEMS, sensor, microsystem

The technology called MEMS (Micro Electro Mechanical Systems) and Microsystems combines various technologies to semiconductor microfabrication for integrated circuits. These have been used as key components of systems as sensors. I have been involved in the MEMS for half a century. Packaging, integration with LSI and industrialization will be presented.