[24p-D316-1~11] 1.3 Novel technologies and interdisciplinary engineering

[24p-D316-6] Fabrication and Characterization for Nano-structures of Al₂O₃ Formed by Soaking in Hot Water after Deposition by ALD

〇Taegyu Woo¹, Yuuki Tsuji¹, Shouhei Lin¹, Joji Maeda¹, Taro Itatani², Takeru Amano² (1.Tokyo Univ. of Science, 2.AIST)

Keywords:Atomic Layer Deposition, Al2O3, Anti-reflecting

The nano-structures were formed by soaking in hot water treatment of Al₂O₃ films deposited by the atomic layer deposition, and a reduction in reflectance was observed.