Study on generation technology of ultra-high power atmospheric pressure thermal plasma jet

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Thu. Mar 24, 2022 1:30 PM - 6:00 PM E103 (E103)

Yan Wu(Nihon Univ.), Katsunori Makihara(Nagoya Univ.)

1:30 PM - 1:45 PM

〇(M1)Kenshiro Horiuchi¹, Takuma Sato¹, Hiroaki Hanafusa¹, Seiichirou Higashi¹ (1.Hiroshima Univ.)

Keywords:plasma