4:45 PM - 5:00 PM
[24p-E103-13] Characteristic Analysis of poly-Si TFTs with Ti Source/Drain Structure using Device Simulator
Keywords:TFT, device simulation
Presentation information
Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
[24p-E103-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Thu. Mar 24, 2022 1:30 PM - 6:00 PM E103 (E103)
Yan Wu(Nihon Univ.), Katsunori Makihara(Nagoya Univ.)