[24p-E103-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[24p-E103-15] Crystallization by Rapid Thermal Annealing of Sputtered InSb Films Deposited on Glass Using Ne

Otokichi Shimoda¹, Charith Jayanada Koswaththage¹, Takashi Noguchi¹, Takashi Kajiwara², Taizoh Sadoh², 〇Tatsuya Okada¹ (1.Univ. Ryukyus, 2.Kyushu Univ.)

Keywords:InSb, RTA