[24p-E103-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[24p-E103-17] Performance of n-ch and p-ch Cu-MIC self-aligned DG poly-Ge TFTs on glass substrates

〇Sho Suzuki¹, Keigo Tomizuka¹, Akito Hara¹ (1.Tohoku Gakuin Univ.)

Keywords:semiconductor, germanium, TFT