Pulse duration dependence of picosecond laser induced nano-periodic structures of DLC on SiC

Taketo Furuichi, Ken Yamamoto, Eibon Tsuchiya, Takashi Takahashi, Yoshiharu Utsumi, Akinori Shibata, Makoto Yamaguchi, Yohei Kobayashi, Takuro Tomita

Presentation information

Oral presentation

3 Optics and Photonics » 3.7 Laser processing

[24p-E106-1~18] 3.7 Laser processing

Thu. Mar 24, 2022 1:30 PM - 6:30 PM E106 (E106)

Kotaro Obata(RIKEN), Seisuke Nakashima(Shizuoka Univ.), Takuro Tomita(Tokushima Univ.)

1:30 PM - 1:45 PM

[24p-E106-1] Pulse duration dependence of picosecond laser induced nano-periodic structures of DLC on SiC

〇Taketo Furuichi¹, Ken Yamamoto¹, Eibon Tsuchiya², Takashi Takahashi², Yoshiharu Utsumi³, Akinori Shibata⁴, Makoto Yamaguchi⁵, Yohei Kobayashi², Takuro Tomita¹ (1.Tokushima Univ., 2.ISSP Univ of Tokyo, 3.Nippon ITF Inc., 4.NISSIN ELECTRIC, 5.Akita Univ.)

Keywords:laser induced nano-periodic structures, pulse duration dependence, diamond like carbon