[24p-E106-1~18] 3.7 Laser processing

[24p-E106-16] Trial of Real-Time Temperature Measurement during Laser Processing

〇Hideyuki Takada¹, Dai Yoshitomi¹, Aiko Narazaki¹ (1.AIST)

Keywords:laser processing, temperature measurement, ultrashort pulse laser

We are currently developing a real-time temperature measurement system with high speed and high positional resolution that can follow the rapid temperature change near the processing point, in order to realize high-precision process control and quality control in ultrashort pulsed laser processing, which is one of our specialties in non-thermal processing. In this paper, we report on the implementation of the temperature measurement system in our variable parameter ultrashort pulsed laser processing system and the trial of the real-time measurement of the temperature during processing.