[24p-E202-1~8] 7.1 X-ray technologies

[24p-E202-3] X-ray two-beam topography to reveal vortex wave field formed by screw dislocation in crystalline silicon carbide

〇yoshiki kohmura¹, kenji ohwada², kei sawada¹, masaichiro mizumaki³, watanuki tetsu², ishikawa tetsuya¹ (1.RIKEN, 2.QST, 3.JASRI)

Keywords:semiconductor, x-ray topography

Periodical media with the period length close to the wave-length of electromagnetic wave, crystals for the case of X-rays, could be utilized for the precise control of the wave front. For this demonstration, we payed attention to the X-ray wave-front transcription by Bragg reflection on a SiC crystal containing a spiral dislocation. When an off-Bragg condition is used, an X-ray vortex is predicted to be formed in the diffracted wave front using our kinematical diffraction simulation and was verified using our two-beam x-ray topography experiment. This result is also useful for the evaluation of properties and distribution of defects contained in the next-generation semiconductor devices.