[24p-E204-1~10] 6.2 Carbon-based thin films

[24p-E204-1] Chemical bonding state of DLC deposited by GCIB-assisted deposition

〇Yu Owada¹, Akio Nishiyama², Ryota Yoshikawa², Junji Taguchi², Keiji Komatsu¹, Nobuo Saito¹, Hidetoshi Saitoh¹ (1.Nagaoka Univ. Tech., 2.Nomura Plating Co., Ltd.)

Keywords:Gas Cluster Ion Beam-assisted deposition, Diamond-Like Carbon, Soft X-ray Emission Spectroscopy

Diamond-like carbon (DLC) films were produced by gas cluster ion beam (GCIB) assisted deposition. Glow discharge optical emission spectrometry (GD-OES) was used to measure the elemental distribution in the depth direction and soft X-ray emission spectroscopy (SXES) was used to measure the sp³ and sp² bonded carbon states in the DLC films.