Deposition of hydrogen-free diamond-like carbon film on plastic substrate by high power pulse magnetron sputtering

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

Thu. Mar 24, 2022 1:30 PM - 4:15 PM E204 (E204)

Hiroki Akasaka(Tokyo Tech), Hidetoshi Saitoh(Nagaoka Univ. of Tech.)

2:15 PM - 2:30 PM

〇Takayuki Ohta¹, Akinori Oda², Hiroyuki Kousaka³ (1.Meijo Univ., 2.Chiba Inst. Technol., 3.Gifu Univ.)

Keywords:diamond-like carbon, high power pulse magnetron sputtering