[24p-P07-1~7] 3.9 Terahertz technologies

[24p-P07-3] Experimental determination of the internal mode coupling coefficient in GaAs doubly clamped MEMS beam resonators

〇Kyoji Fukuda¹, Isao Morohashi², Kazuhiko Hirakawa^3,4, Ya Zhang¹ (1.TUAT, 2.NICT, 3.IIS, Tokyo Univ., 4.NanoQuine, Tokyo Univ.)

Keywords:MEMS, internal mode coupling, coupling coefficient