Hydrogen cleaning for high-quality conductive AlInN/GaN DBRs

Presentation information

Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

Fri. Mar 25, 2022 9:00 AM - 12:00 PM E203 (E203)

Hiroto Sekiguchi(Toyohashi Univ. of Tech.), Momoko Deura(Univ. of Tokyo)

11:30 AM - 11:45 AM

〇Kana Shibata¹, Tetsuro Inagaki¹, Tsuyoshi Nagasawa¹, Tetsuya Takeuchi¹, Satoshi Kamiyama¹, Motoaki Iwaya¹ (1.Meijo Univ.)

Keywords:semiconductor