Observation of substrate deformation in diamond heteroepitaxy

Yutaka Kimura, Takahiro Ihara, Takumi Ojima, Hina Tanaka, Ryuji Oshima, Atsuhito Sawabe, Hideo Aida

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[25a-E204-1~10] 6.2 Carbon-based thin films

Fri. Mar 25, 2022 9:00 AM - 12:00 PM E204 (E204)

Masahiko Ogura(AIST), Ryota OHTANI(Asahi Diamond)

11:45 AM - 12:00 PM

[25a-E204-10] Observation of substrate deformation in diamond heteroepitaxy

〇Yutaka Kimura¹, Takahiro Ihara², Takumi Ojima², Hina Tanaka², Ryuji Oshima^2,3, Atsuhito Sawabe¹, Hideo Aida² (1.Aoyama Gakuin Univ., 2.Nagaoka Univ. of Tech., 3.DISCO Corporation)

Keywords:heteroepitaxial diamond, curvature

ヘテロエピタキシャルダイヤモンド成長におけるダイヤモンド薄膜の曲率と膜厚の関係について