[25a-E302-1~10] 3.8 Optical measurement, instrumentation, and sensor

[25a-E302-6] Quantitative ellipsometry and ToF analysis for laser scanning OFC microscopy

〇Shimpei Kajiwara¹, Takeo Minamikawa^1,2, Keishirou Ootani¹, Shota Nakano¹, Eiji Hase², Takeshi Yasui^1,2 (1.Tokushima Univ., 2.pLED,Tokushima Univ.)

Keywords:optical frequency comb, dual-comb spectroscopy

It is able to measure the intensity and phase of light by laser scanning OFC (optical frequency comb) microscopy simulutaneously. This time, we analyzed the ellipsometry as this application and the ToF (time of flight) by streching the femtosecond time variation using the dual-comb spectroscopy. As a result, it was clarified that it is possible to measure the ellipsometry and the ToF with a high precision.