10:30 AM - 10:45 AM
▲ [25a-F307-5] Epitaxial growth of Bi3O2S2Cl thin films with mist chemical vapor deposition
Keywords:Epitaxial thin film, mist CVD, mixed anion compound
Oral presentation
6 Thin Films and Surfaces » 6.4 Thin films and New materials
Fri. Mar 25, 2022 9:15 AM - 11:30 AM F307 (F307)
Daichi Oka(Tohoku Univ. ), Hiroshi Takatsu(Kyoto Univ. )
10:30 AM - 10:45 AM
Keywords:Epitaxial thin film, mist CVD, mixed anion compound