The 69th JSAP Spring Meeting 2022

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3 Optics and Photonics » 3.10 Optical quantum physics and technologies

[25p-D214-1~17] 3.10 Optical quantum physics and technologies

Fri. Mar 25, 2022 1:00 PM - 5:30 PM D214 (D214)

Yasuyuki Ozeki(Univ. of Tokyo), Takehiko Tawara(Nihon Univ.)

2:30 PM - 2:45 PM

[25p-D214-7] Investigation of on-chip free-space liner optical circuits

〇Takuya Inagaki1, Takumi Ishikawa1, Yoshiaki Kanamori1, Hirohito Yamada1, Nobuyuki Matsuda1,2 (1.Eng., Tohoku Univ., 2.OAS, Tohoku Univ.)

Keywords:silicon photonics, Deep RIE