The 69th JSAP Spring Meeting 2022

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Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[25p-E203-1~17] 15.4 III-V-group nitride crystals

Fri. Mar 25, 2022 1:30 PM - 6:15 PM E203 (E203)

Tsutomu Araki(Ritsumeikan Univ.), Akihiko Kikuchi(Sophia Univ.), Masato Oda(Wakayama Univ.)

1:30 PM - 1:45 PM

[25p-E203-1] Polarity Control of Annealed Sputtered AlN Using an Al Metal Target

〇(M1)Takumi Hashimoto1, Kanako Shojiki3, Kenjiro Uesugi1,2, Shiyu Xiao2, Shigeyuki Kuboya2, Hideto Miyake1,3 (1.Grad. Sch. of RIS. Mie Univ., 2.SPORR Mie Univ., 3.Grad. Sch. of Eng. Mie Univ.)

Keywords:aluminum nitride, polarity control, sputtering