The 69th JSAP Spring Meeting 2022

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15 Crystal Engineering » 15.4 III-V-group nitride crystals

[25p-E203-1~17] 15.4 III-V-group nitride crystals

Fri. Mar 25, 2022 1:30 PM - 6:15 PM E203 (E203)

Tsutomu Araki(Ritsumeikan Univ.), Akihiko Kikuchi(Sophia Univ.), Masato Oda(Wakayama Univ.)

2:00 PM - 2:15 PM

[25p-E203-3] Effect of Sapphire-Substrate Off-Cut Angles on N-polar Annealed Sputter-Deposited AlN Films

〇(M1)Gaku Namikawa1, Shigeyuki Kuboya2, Kanako Shojiki1, Ryuichi Mori1, Kenjiro Uesugi2,3, Hideto Miyake1,3 (1.Grad. Sch. of Eng. Mie Univ., 2.SPORR Mie Univ., 3.Grad. Sch. of RIS. Mie Univ.)

Keywords:Aluminum nitride, N-polarity, Off-cut angle