The 69th JSAP Spring Meeting 2022

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Oral presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[25p-E305-1~18] 6.1 Ferroelectric thin films

Fri. Mar 25, 2022 1:30 PM - 6:30 PM E305 (E305)

Isaku Kanno(Kobe Univ.), Takeshi Kobayashi(AIST), Shinya Yoshida(Tohoku Univ.)

4:00 PM - 4:15 PM

[25p-E305-10] Evaluation of stress distribution using piezoelectric matrix sensor

〇Ryogo Yokoyama1, Takashi Nakajima1 (1.Tokyo Univ of Sci.)

Keywords:piezoelectric, sensor device