[25p-E307-1~15] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

▲ [25p-E307-9] Density Functional Theory Study of Cu(II) Acetylacetonate Adsorption on Cu (111) surface

〇(D)Yuxuan Wu¹, Noboru Sato¹, Jun Yamaguchi¹, Momoko Deura¹, Takeshi Momose¹, Yukihiro Shimogaki¹ (1.The Univ. of Tokyo)

Keywords:thin film, atomic layer deposition, density functional theory

Cu atomic layer deposition highly depends on the adsorption behavior on surfaces. Here we use Density Functional Theory to understand the surface adsorption of Cu(II) Acetylacetonate on Cu (111) surface. The energy of adsorption is calculated under various adsorption conditions. The calculated adsorption energy will evaluate the feasibility of atomic layer deposition in the future by examining if the surface coverage is sufficient (KC >> 1).