Effect of SiO<sub>x</sub> interlayer on electrical properties of ZrO<sub>x</sub>-based ReRAM

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.3 Oxide electronics

Fri. Mar 25, 2022 1:30 PM - 3:30 PM P01 (Poster)

1:30 PM - 3:30 PM

〇(M2)Keito Touyama¹, Ryusuke Akiyama¹, Yuki Kento¹, Kazuhito Tukagoshi², Shinya Aikawa¹ (1.Kogakuin Univ., 2.NIMS)

Keywords:ReRAM, Precious Metal Free, ZrOx,SiO2