[25p-P09-1~11] 3.13 Semiconductor optical devices

[25p-P09-11] Light Detection Characteristics in SOI Photodiode with Hexagonal Lattice Hole-Array Type Metallic Grating

〇Ryuji Yamamoto¹, Ryo Takane², Hiroaki Satoh^1,2,3, Hiroshi Inokawa^1,2,3 (1.Faculty of Eng, Shizuoka Univ., 2.GSIST, Shizuoka Univ., 3.RIE, Shizuoka Univ.)

Keywords:SOI Photodiode, SP antenna, spectroscopic light sensitivity

In SOI photodiode with hexagonal lattice hole-array type metallic grating, higher light sensitivity can be attained, when the phase matching condition between the diffracted light from grating and the SOI waveguiding mode is satisfied (λ_g = p × 3^1/2 / 2, p is grating period). This relationship is different from the cases of line-and-space type or square lattice hole-arrya type.
In this report, the spectroscopic light sensitivity with respect to the aperture ratio of hole array is discussed in order to investigate the detailed characteritics in SOI photodiode with hexagonal lattice hole-array type metallic grating.