[25p-P09-1~11] 3.13 Semiconductor optical devices

[25p-P09-9] Fabrication of a flexible CMOS image sensor integrating crystalline selenium photoconversion film and FDSOI circuit

〇Shigeyuki Imura¹, Masahide Goto¹ (1.NHK STRL)

Keywords:flexible sensor, FDSOI, crystalline selenium

In order to get and visualize all kinds of information around us, high-performance flexible sensors that can be freely bent according to their shape are useful. In recent years, the development of flexible sensors using organic and inorganic TFTs has been actively pursued, but the challenge for practical use is to improve the performance and reliability of the devices. In this study, we transfer the ultra-thin CMOS circuit and photoconversion film onto a flexible substrate to realize a flexible sensor with both high performance and flexibility. We report a prototype of a high-performance flexible CMOS image sensor by combining a CMOS circuit formed on a fully depleted silicon on insulator (FDSOI) substrate, which allows a thin device layer, and a crystalline selenium photoelectric conversion film with excellent light absorption characteristics.