[25p-P11-1~16] 13.7 Compound and power devices, process technology and characterization

[25p-P11-16] Prevention of Electrostatic Discharge during Two-Fluid Spray Cleaning

〇Hiroharu Suzuki¹, Yasuaki Fukuoka¹, Keiichi Ikeda¹, Sota Muto¹, Tatsuo Mori¹, Yusuke Ichino¹, Yoshiyuki Seike¹ (1.Aichi Inst. Tech.)

Keywords:Two-Fluid Spray Cleaning, Electrostatic Discharge