The 69th JSAP Spring Meeting 2022

Presentation information

Poster presentation

15 Crystal Engineering » 15.6 Group IV Compound Semiconductors (SiC)

[25p-P12-1~2] 15.6 Group IV Compound Semiconductors (SiC)

Fri. Mar 25, 2022 4:00 PM - 6:00 PM P12 (Poster)

4:00 PM - 6:00 PM

[25p-P12-1] Structural analysis of expanded parallelogram shaped stacking fault in 4H-SiC epilayer

〇Chiharu Ota1, Johji Nishio1, Ryosuke Iijima1 (1.Toshiba Corp.)

Keywords:SiC, 1SSF, Structural analysis