[26a-E302-1~11] 3.8 Optical measurement, instrumentation, and sensor

[26a-E302-4] Transparent substrate in reflection-transmission ellipsometry measurement

〇Sota Mogi¹, Keisuke Arimoto¹, Eiichi Kondoh¹, Lianhua Jin¹, Bernard Gelloz² (1.Univ. of Yamanashi, 2.Nagoya Univ.)

Keywords:ellipsometry