The 69th JSAP Spring Meeting 2022

Presentation information

Oral presentation

21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[26p-E202-1~14] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Sat. Mar 26, 2022 1:00 PM - 4:45 PM E202 (E202)

Kohei Sasaki(Novel Crystal Technology), Oshima Yuichi(NIMS)

1:30 PM - 1:45 PM

[26p-E202-3] Thermodynamic study of Ga2O3 growth using Ga2O and H2O source gases

〇Rie Togashi1, Akari Suzuki1, Haruka Ishida1, Shigeyoshi Usami2, Masayuki Imanishi2, Masahiko Hata3, Yusuke Mori2 (1.Sophia Univ., 2.Osaka Univ., 3.Itochu Plastics Inc.)

Keywords:Ga2O3, OVPE, Thermodynamics