The 69th JSAP Spring Meeting 2022

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CS Code-sharing session » 【CS.6】 Code-sharing Session of 6.5 & 7.6

[26p-E206-1~14] CS.6 Code-sharing Session of 6.5 & 7.6

Sat. Mar 26, 2022 1:00 PM - 5:15 PM E206 (E206)

Masahito Tagawa(Kobe Univ.), Naoka Nagamura(NIMS), Masaru Takizawa(立命館大)

1:30 PM - 1:45 PM

△ [26p-E206-3] Comparison between n- and p-type on oxidation at SiO2/Si(001) interfaces

〇(P)Yasutaka Tsuda1, Shuichi Ogawa2,3, Akitaka Yoshigoe1, Tetsuya Sakamoto1, Aki Tominaga1, Yoshiki Yamamoto4, Yukio Yamamoto4, Yuji Takakuwa5 (1.MSR, JAEA, 2.SRIS, Tohoku Univ., 3.IMRAM, Tohoku Univ., 4.NIT, Fukui Col., 5.mSIC, Tohoku Univ.)

Keywords:semiconductor, oxidation, Silicon