The 69th JSAP Spring Meeting 2022

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3 Optics and Photonics » 3.13 Semiconductor optical devices

[26p-E301-1~12] 3.13 Semiconductor optical devices

Sat. Mar 26, 2022 1:30 PM - 5:00 PM E301 (E301)

Taro Arakawa(Yokohama Natl. Univ.), Tomoyuki Miyamoto(Tokyo Tech)

2:45 PM - 3:00 PM

△ [26p-E301-5] Failure Analysis of Electrostatic Discharged InP/InGaAs Photodiode

〇Yuta Ito1, Ryo Yokogawa1,2, Naomi Sawamoto1, Osamu Ueda2, Atsushi Ogura1,2 (1.Meiji Univ., 2.MREL)

Keywords:Photodiode, Electrostatic Discharge, Failure Analysis