The 69th JSAP Spring Meeting 2022

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3 Optics and Photonics » 3.8 Optical measurement, instrumentation, and sensor

[26p-E302-1~13] 3.8 Optical measurement, instrumentation, and sensor

Sat. Mar 26, 2022 1:30 PM - 5:00 PM E302 (E302)

Toshihiro Somekawa(Inst. for Laser Tech.), Koyama Yuya(Chiba Institute of Technology)

4:45 PM - 5:00 PM

[26p-E302-13] Experiment of Oblique Imaging by Using Pupil Divided Optics with Magnification Correction

〇Eiji Arima1, Yuta Urano1, Shunichi Matsumoto2, Toshifumi Honda1 (1.Hitachi, Ltd. R&D Group, 2.Hitachi High-Tech Corp.)

Keywords:Optical inspection, Lens array, Extending depth of focus