[26p-E302-1~13] 3.8 Optical measurement, instrumentation, and sensor

[26p-E302-3] 1D Line-Scan LiDAR with MEMS Phased Array

〇Kazuki Watatani¹, Yuki Ashida¹ (1.SCREEN Holdings)

Keywords:LiDAR, Beam Steering, optoelectronic device

We have developed a MEMS phased array supporting up to infrared wavelength and demonstrated ToF LiDAR. This MEMS phased array is a spatial light modulator composed of thousands of controllable independent structures over 100kHz. It is realized 3D depth mapping by 1D line beam steering with high precision in a horizontal direction and detecting a vertical direction of 1D array sensor. We showed ±3% precision into known distances of ~5.5m. We will report in detail on the performance of the beam steering by the MEMS phased array on the day.