[17p-A301-1~18] 13.7 Compound and power devices, process technology and characterization

3:45 PM - 4:00 PM

[17p-A301-11] Development of GaN Recycling Wafer Process Enabling Low Cost and CO₂ Emission

〇Junji Ohara¹, Masatake Nagaya¹, Kazukuni Hara¹, Shinichi Hoshi¹, Takashi Kanemura¹, Takashi Ushijima¹, Takashi Ishida¹, Shosuke Nakabayashi¹, Kozo Kato¹, Takayuki Koyama¹, Yoshitaka Nagasato¹, Kazuhiro Tsuruta¹, Jun Kojima^1,2, Shoichi Onda^1,2, Tsutomu Uesugi², Atsushi Tanaka², Chiaki Sasaoka², Jun Suda², Keisuke Hara³, Daisuke Kawaguchi³, Koji Kuno³, Tetsuya Osajima³ (1.MIRISE, 2.Nagoya Univ., 3.HAMAMATSU PHOTONICS)

Junji Ohara

Speaker, Author, Co-Author

[17p-A301-1~18] 13.7 Compound and power devices, process technology and characterization

[17p-A301-11] Development of GaN Recycling Wafer Process Enabling Low Cost and CO2 Emission

[17p-A301-11] Development of GaN Recycling Wafer Process Enabling Low Cost and CO₂ Emission